With this paper, the new lapping slurry and sprucing slurry are launched. And the deliquescence degree of CLBO is fallen to lowest. A whole new Doing the job technologies is likewise adopted. Soon after tough sharpening, the focus of extremely-precision sharpening slurry is greater adequately. So does the extremely-precision sharpening speed, plus the wiping speed is faster as opposed to deliquescence velocity. The CLBO crystal floor roughness can realize 1nm and keep the surface area top quality perfectly. Entry by way of your establishment
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The typical power of the NIR laser still has the opportunity to get improved to tens of watts which include 70 W [26] In case the double-pass configuration can be utilized for the Yb:YAG SCF amplifier stage. That's why, When the conversion effectiveness of 31% from NIR to DUV can be even now managed at this larger ability situation, the normal output power in the DUV laser at 258 nm may very well be over twenty W, which might certainly be a outstanding electrical power stage for that DUV laser and bring on the unanticipated DUV laser machining success. Moreover, for top-ability DUV laser, the UV problems with the nonlinear crystal, including the windows for CLBO crystal and also the mirrors, is another vital parameter for long-lasting and steady operation.
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On one other aspect, the power scaling of the NIR laser is yet another element to increase the ordinary electric power in the 193-nm DUV laser. Because of the not enough the large-electric power amplification Remedy of your NIR laser (by way of example at 1553 nm), nonlinear frequency procedures for example optical parameter oscillation (OPO) could be applied to develop a wavelength converter by shifting the wavelength from one μm to the desired wavelength and also getting relative higher electricity [21]. Recently, a diamond Raman laser showed its capacity in attaining a significant ability along with a large conversion effectiveness with the 1st Stokes in the 1-μm laser [22,23], which suggests the likelihood for being utilized inside the 193-nm DUV laser generation due to its higher Raman attain and enormous frequency shift.
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The pulse length of the 2nd Stokes gentle was shortened to five ns as proven in click here Determine 7a, just one-shot photograph from your oscilloscope, which is a typical phenomenon in Raman laser [forty four] even though the pulse length of your pump laser was 10 ns.
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The beam profile revealed in Determine 7b demonstrated a great beam good quality as on the list of deserves of Raman laser, which might be useful to crank out a 193-nm DUV laser with a top quality beam.
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The event of your 193-nm laser was demonstrated by phases of SFG. In order to scale the DUV laser electric power efficiently, a completely new idea on the 193-nm DUV laser technology is introduced depending on the diamond Raman laser.